Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments-Reference-Cited by-同舟云学术

Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments

Published:2021-11-21 Issue: Volume: Page:
ISSN:
Container-title:2021 Photonics & Electromagnetics Research Symposium (PIERS)
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Author:

Drexler P.¹,Fiala P.²,Klima M.¹,Szabo Z.¹,Dostal L.³,Kadlec R.¹,Pernica R.¹

Affiliation:

1. Brno University of Technology, Technicka 3082/12,Department of Theoretical and Experimental Electrical Engineering,Brno,Czech Republic,616 00

2. Brno University of Technology, Technicka 3082/12,SIX Centre,Department of Theoretical and Experimental Electrical Engineering,Brno,Czech Republic,616 00

3. Brno University of Technology, Technicka 3082/12,CVVOZE Centre,Department of Electrical Power Engineering, Faculty of Electrical Engineering and Communication,Brno,Czech Republic,616 00

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9694620/9694666/09694874.pdf?arnumber=9694874

Reference19 articles.

1. Plasma pencil as an excitation source for atomic emission spectrometry

2. HF plasma pencil and DC diaphragm discharge in liquids — diagnostics and applications

3. Plasma-enhanced CVD of functional coatings in Ar/maleic anhydride/C2H2homogeneous dielectric barrier discharges at atmospheric pressure

4. On the interplay of gas dynamics and the electromagnetic field in an atmospheric Ar/H2microwave plasma torch

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