Monitoring Megasonic Solvent Combination with Temperature-Reference-Cited by-同舟云学术

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Monitoring Megasonic Solvent Combination with Temperature

Published:2024-05-16 Issue: Volume: Page:1-6
ISSN:
Container-title:2024 4th International Conference on Innovative Research in Applied Science, Engineering and Technology (IRASET)
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Author:

Rhabi Taha Yassine¹,Taha Mohamed¹,Arjdal Elhanafi²,Hmamou Dris Ben²,Ydir Brahim²

Affiliation:

1. Laboratory of Thermodynamics and Energy Faculty of Sciences of Agadir Ibn Zohr University,Agadir,Morocco,80000

2. Signal Processing and Physical Modeling Faculty of Sciences of Agadir Ibn Zohr University,Laboratory of Electronics,Agadir,Morocco,80000

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10548014/10548010/10548970.pdf?arnumber=10548970

Reference22 articles.

1. Using Megasonics to Extend Chemical Cleans for 45nm Technology

2. REMOVAL OF PARTICULATE CONTAMINANTS USING ULTRASONICS AND MEGASONICS: A REVIEW

3. Advanced aqueous wafer cleaning in power semiconductor device manufacturing

4. Studies of the Relationship between Megasonics, Surface Etching, and Particle Removal in SC-1 Solutions

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