1. Dept. of Adv. Electron. Mater., Dow Chem. Co., Midland, MI
2. Dow Europe, 77834 Rheinmünster, Germany
3. Advanced Electronic Materials, The Dow Chemical Company, Midland, MI
48674 USA
4. The Dow Chemical Company, Research Triangle Park, NC
27709-2889 USA.
5. Analytical Sciences Laboratory, The Dow Chemical
Company, Midland, MI 48667 USA.
6. Fraunhofer Institute for Reliability
and Microintegration, Berlin D-13355, Germany