High-Q UHF micromechanical radial-contour mode disk resonators-Reference-Cited by-同舟云学术

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High-Q UHF micromechanical radial-contour mode disk resonators

Published:2005-12 Issue:6 Volume:14 Page:1298-1310
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Clark J.R.,Hsu W.-T.,Abdelmoneum M.A.,Nguyen C.T.-C.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/33032/01549864.pdf?arnumber=1549864

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