A 13.56-MHz ZVS Inverter for Radio-Frequency Capacitively Coupled Plasma Power Supply-Reference-Cited by-同舟云学术

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A 13.56-MHz ZVS Inverter for Radio-Frequency Capacitively Coupled Plasma Power Supply

Published:2022-08 Issue:8 Volume:37 Page:9481-9491
ISSN:0885-8993
Container-title:IEEE Transactions on Power Electronics
language:
Short-container-title:IEEE Trans. Power Electron.

Author:

Chen Si¹^ORCID,Ruan Xinbo¹^ORCID,Li Ying²^ORCID

Affiliation:

1. Center for More-Electrical-Aircraft Power System, College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China

2. Research Group of Power Electronics, Machines and Control, University of Nottingham, Nottingham, U.K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx7/63/9770296/09735318.pdf?arnumber=9735318

Reference21 articles.

1. Electrical characteristics of parallel-plate RF discharges in argon

2. Plasmakristall-4: New complex (dusty) plasma laboratory on board the International Space Station

3. Class E-A new class of high-efficiency tuned single-ended switching power amplifiers

4. A Push–Pull Class-E Inverter With Improved Efficiency

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