On feedforward control of piezoelectric dual-stage actuator systems
Author:
Funder
ASML
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9682670/9682776/09683598.pdf?arnumber=9683598
Reference17 articles.
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2. Trajectory planning and feedforward design for electromechanical motion systems
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4. Modeling piezoelectric actuators
5. Towards ultimate optical lithography with NXT:1950i dual stage immersion platform
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