A 336 x 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10m-Reference-Cited by-同舟云学术

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A 336 x 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10m

Published:2024-06-16 Issue: Volume: Page:1-2
ISSN:
Container-title:2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
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Author:

Jang Jaehyung¹,Kim Jongchae¹,Oh Sunho¹,Byun Kyungsu¹,Park Dahwan¹,Han Jihee¹,Lee Hanseung¹,Yi Suhyun¹,Choi Hoonmoo¹,Kim Jongeun¹,Kim Namil¹,Gim Yongtae¹,Kim Minkyu¹,Lee Sangyoung¹,Kim Hansang¹,Lee Eunchang¹,Yu Minsang¹,Hwang Jeongjoon¹,Yoon Seunghyun¹,Hwangbo Kwang¹,Kim Heesang¹,Cho Ahyoung¹,Baek Taejun¹,Park Sooyoung¹,Cho Kwangjun¹,Park Wonje¹,Kim Kyung-do¹,Jeong Hoesam¹,Oh Hoon-sang¹,Song Chang-rock¹

Affiliation:

1. SK hynix Inc., CIS Development,Icheon-si,Gyeonggi-do,Korea

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10631290/10631310/10631458.pdf?arnumber=10631458

Reference4 articles.

1. VLSI 85: VLSI design of digital systems

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