A study of methods for moving particles in RF processing plasmas-Reference-Cited by-同舟云学术

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A study of methods for moving particles in RF processing plasmas

Published:1994-04 Issue:2 Volume:22 Page:128-135
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Beck S.E.,Collins S.M.,O'Hanlon J.F.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx1/27/6916/00279015.pdf?arnumber=279015

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