Research and Application of Defect Detection Method for Electronic Wafer Based on Machine Vision
Author:
Affiliation:
1. Xiamen Institute of Technology,The Higher Educational Key Laboratory for Flexible Manufacturing Equipment Integration of Fujian Province,Xiamen,China,361021
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10491598/10491601/10491707.pdf?arnumber=10491707
Reference15 articles.
1. Chip and digital economy, balance of short-term and long-term interests;Wang;Times of Fortune,2021
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3. The Semiconductor Quality Management Using The Map Pattern Index
4. Bin2Vec: A Better Wafer Bin Map Coloring Scheme for Comprehensible Visualization and Effective Bad Wafer Classification
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