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2. A technique for extracting and analyzing the polarization aberration of hyper-numerical aperture image optics;yanqiu;2013 International Conference on Optical Instruments and Technology Optical Systems and Modern Optoelectronic Instruments,0
3. Electromagnetic diffraction in optical systems-I. An integral representation of the image field;emil;Proceedings of the Royal Society of London Series A Mathematical and Physical Sciences,0
4. Modeling polarization for hyper-NA lithography tools and masks;kafai;Optical Microlithography XXI,0
5. Mechanism of resist pattern collapse during development process;toshihiko;Japanese Journal of Applied Physics,1993