Author:
Dutta Somenath,Datta Tanmoy,Sen Mrinal,Deyasi Arpan
Cited by
1 articles.
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1. Fabrication of Nano-Scale Features using Non-Dedicated EBL and Capacitively Coupled RIE;2024 IEEE International Conference on Interdisciplinary Approaches in Technology and Management for Social Innovation (IATMSI);2024-03-14