Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Condensed Matter Physics,Nuclear and High Energy Physics
Link
http://xplorestaging.ieee.org/ielx5/27/6403593/06387316.pdf?arnumber=6387316
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effects of Deposition Pressure and Pulse Frequency on Properties for Si-DLC Films Prepared on Surface of Internal Spline Tooth;CHINA SURF ENG;2022
2. Numerical Analysis of Magnetized Sheath for Inner Surface Modification;IEEE Access;2019
3. Normalized ion distribution function in expanding sheaths of 2D grid electrodes;Plasma Sources Science and Technology;2016-02-12
4. Modeling of Inner Surface Modification of a Cylindrical Tube by Plasma-Based Low-Energy Ion Implantation;Plasma Science and Technology;2015-03-31
5. Nitrogen mass transfer models for plasma-based low-energy ion implantation;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2015-03
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