Drive mode control for MEMS gyroscopes with electrostatically tunable structure-Reference-Cited by-同舟云学术

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Drive mode control for MEMS gyroscopes with electrostatically tunable structure

Published:2013-08 Issue: Volume: Page:
ISSN:
Container-title:2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale
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Author:

Zhu Huijie,Jin Zhonghe,Hu Shichang,Ma Wei,Liu Yidong

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6720584/6737367/06737430.pdf?arnumber=6737430

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A 0.09°/h Bias-Instability MEMS Gyroscope Working With a Fixed Resonance Frequency;IEEE Sensors Journal;2021-11-01

2. A sub-0.1°/h bias-instability MEMS gyroscope using resonant constant-frequency driving technique;2021 IEEE Sensors;2021-10-31

3. Nonlinear dynamics of MEMS resonator in PLL-AGC self-oscillation loop;Nonlinear Dynamics;2021-06

4. A stiffness-tunable MEMS accelerometer;Journal of Micromechanics and Microengineering;2020-12-23

5. A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique;Journal of Micromechanics and Microengineering;2016-12-20

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