A Compliant Nano-manipulator-based Scanning Probe Lithography System-Reference-Cited by-同舟云学术

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A Compliant Nano-manipulator-based Scanning Probe Lithography System

Published:2022-08-08 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
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Author:

Liu Yijie¹,Zhang Zhen²

Affiliation:

1. Institute of Manufacturing Engineering, Tsinghua University,State Key Laboratory of Tribology,Department of Mechanical Engineering,Beijing,China

2. Institute of Manufacturing Engineering, Tsinghua University,State Key Laboratory of Tribology, Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control,Department of Mechanical Engineering Beijing,Beijing,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9941348/9941352/09941626.pdf?arnumber=9941626

Reference18 articles.

1. Recent advances in AFM tip-based nanomechanical machining

2. Pulse-Atomic Force Lithography: A Powerful Nanofabrication Technique to Fabricate Constant and Varying-Depth Nanostructures

3. Insight into mechanics of AFM tip-based nanomachining: bending of cantilevers and machined grooves

4. Characterization study on machining PMMA thin-film using AFM tip-based dynamic plowing lithography

5. Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

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