High Precision Control System for the Nanomechanical Devices Based on Alloys with Shape Memory Effect-Reference-Cited by-同舟云学术

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High Precision Control System for the Nanomechanical Devices Based on Alloys with Shape Memory Effect

Published:2022-08-08 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
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Author:

Prokunin Aleksei¹,Koledov Victor¹,Shavrov Vladimir¹,Kuznetsov Dmitry¹,Lega Peter¹,Orlov Andrey¹,Irzhak Artem²,Musabirov Irek³

Affiliation:

1. Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences,Moscow,Russian Federation

2. Institute of Microelectronics Technology and High-Purity Materials of Russian Academy of Sciences,Chernogolovka,Russian Federation

3. Institute of Problems of Metal Superplasticity of the Russian Academy of Sciences,Ufa,Russian Federation

Funder

RSF

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9941348/9941352/09941592.pdf?arnumber=9941592

Reference5 articles.

1. Simulation of the control process applied to the micromechanical device with the shape memory effect

2. New system for manipulation of nanoobjects based on composite Ti2NiCu/Pt nanotweezers with shape memory effect

3. Thermally Controlled Nanoobjects Manipulation System Based on Composite Ti2NiCu/Pt Nanotweezers;zhikharev;6th IEEE International Conference on Manipulation Manufacturing and Measurement on the Nanoscale (IEEE 3M–NANO),0

4. Simulation of Control System for Shape Memory Nanotweezers

5. Advanced System for Nanofabrication and Nanomanipulation Based on Shape Memory Alloy

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