Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model
Author:
Affiliation:
1. Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China
Funder
National Key Research and Development Program of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/10012124/09947034.pdf?arnumber=9947034
Reference25 articles.
1. High Sensitivity, Miniature, Full 2-D Anemometer Based on MEMS Hot-Film Sensors
2. Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology
3. CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application
4. Silicon thermal flow sensor with a two-dimensional direction sensitivity
5. Configuration of a Self-Heated Double Wheatstone Bridge for 2-D Wind Sensors
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. System-Level Optimization of MEMS Thermal Wind Sensor Based on the Co-Simulation of Macromodel and Board-Level Interface Circuits;Journal of Microelectromechanical Systems;2023-12
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