Novel Vertical Scanning Algorithm With Advanced Control to Increase Range and Accuracy of Differential Confocal Microscopy
Author:
Affiliation:
1. Department of Electrical Engineering, National Central University, Taoyuan, Taiwan
2. MediaTek Inc., Hsinchu, Taiwan
3. Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan
Funder
Ministry of Science and Technology of the Republic of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/9717300/09785574.pdf?arnumber=9785574
Reference26 articles.
1. Digital differential confocal microscopy based on spatial shift transformation
2. Real-time laser differential confocal microscopy without sample reflectivity effects
3. Three-dimensional super-resolution correlation-differential confocal microscopy with nanometer axial focusing accuracy
4. A Self-Designed Laser Scanning Differential Confocal Microscopy with a Novel Vertical Scan Algorithm for Fast Image Scanning
5. Laser confocal feedback tomography and nano-step height measurement
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