Thermally Modulated CMOS-Compatible Particle Sensor for Air Quality Monitoring
Author:
Funder
ICMPPE
BMVIT
BMDW
FFG
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/9717300/09673780.pdf?arnumber=9673780
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1. Evaluating Film Assisted Molding Packaging for Peizoelectric Micromachined Ultrasonic Transducers
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