A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors-Reference-Cited by-同舟云学术

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A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors

Published:2014-08 Issue: Volume: Page:
ISSN:
Container-title:2014 International Conference on Optical MEMS and Nanophotonics
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Author:

Ikegami Keiichi,Koyama Takaaki,Saito Takao,Yasuda Yoshiaki,Toshiyoshi Hiroshi

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6901612/6924493/06924610.pdf?arnumber=6924610

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination;Microsystems & Nanoengineering;2024-01-22

2. Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns through Structure Design and Electrode Arrangement;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

4. Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies;Micromachines;2023-09-19

5. Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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