Measurement of Dynamic Properties of MEMS and the Possibilities of Parameter Identification by Simulation-Reference-Cited by-同舟云学术

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Measurement of Dynamic Properties of MEMS and the Possibilities of Parameter Identification by Simulation

Published:2007-04 Issue: Volume: Page:
ISSN:
Container-title:2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007
language:
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Author:

Ebert Matthias¹,Naumann Falk²,Gerbach Ronny²,Bagdahn Joerg²

Affiliation:

1. Fraunhofer Institute for Mechanics of Materials (IWMH), Heideallee 19, D-06120 Halle, Germany. Tel.: +49(0)345 / 5589 117, Fax: +49(0)345 / 5589 101, matthias.ebert@iwmh.fraunhofer.de

2. Fraunhofer Institute for Mechanics of Materials (IWMH), Heideallee 19, D-06120 Halle, Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4201119/4201120/04201228.pdf?arnumber=4201228

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Identification of mechanical defects in MEMS using dynamic measurements for application in production monitoring;Microsystem Technologies;2010-01-05

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