A 20.4-GHz Lithium Niobate A3-Mode Resonator with High Electromechanical Coupling of 6.95%
Author:
Affiliation:
1. University of Science and Technology of China,School of Microelectronics,Hefei,China
Funder
National Key Research and Development Program of China
Fundamental Research Funds for the Central Universities
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10187888/10187785/10188052.pdf?arnumber=10188052
Reference18 articles.
1. Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
2. 33 GHz Overmoded Bulk Acoustic Resonator
3. RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook
4. Investigation of acoustic waves in thin plates of lithium niobate and lithium tantalate
5. High overtone Bulk Acoustic Resonators: application to resonators, filters and sensors;ballandras;Acoustics Nantes France,2012
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