A Real-Time Determination Method for Homodyne Grating Interferometer Signal Nonlinear Error Based on Duty Cycle Measurement of States-Reference-Cited by-同舟云学术

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A Real-Time Determination Method for Homodyne Grating Interferometer Signal Nonlinear Error Based on Duty Cycle Measurement of States

Published:2024 Issue: Volume:73 Page:1-8
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Wang Weicheng¹^ORCID,Lin Jun¹^ORCID,Jin Siyu²^ORCID,Bai Yu²^ORCID,Liu Lin²^ORCID,Liu Zhaowu²^ORCID,Sun Yishu³^ORCID,Li Wenhao²^ORCID

Affiliation:

1. Key Laboratory of Geophysical Exploration Equipment, Ministry of Education of China, Department of College of Instrumentation and Electrical Engineering, Changchun, China

2. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, China

3. College of Computer and Electrical Engineering, Hunan University of Arts and Science, Changde, China

Funder

National Natural Science Foundation of China

Jilin Provincial Science and Technology Development Plan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/19/10367905/10577593.pdf?arnumber=10577593

Reference29 articles.

1. Field Guide to Displacement Measuring Interferometry

2. Review of geometric error measurement and compensation techniques of ultra-precision machine tools

3. Polarization-modulated grating interferometer by conical diffraction

4. An Adaptive Filter for Subdivision of Circular Grating Signal of Angle Measurement

5. Homodyne Laser Vibrometer With Detectability of Nanoscale Vibration and Adaptability to Reflectivity

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