Research on the Nested Package Structure of a MEMS Vector Hydrophone

Author:

Zhang Jie1ORCID,Zhang Guojun1ORCID,Geng Yanan1ORCID,Ren Weirong1ORCID,Zhu Shan1ORCID,Liu Guochang1ORCID,Liu Yan1ORCID,Jia Li1ORCID,Kong Xiangzheng1ORCID,Wang Jiangjiang1ORCID,Zhang Wendong1ORCID

Affiliation:

1. School of Instrument and Electronics and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China

Funder

National Natural Science Foundation of China through the National Major Scientific Instruments Development Project

National Natural Science Foundation of China

Fund for Shanxi “1331 Project” Key Subject Construction and Innovation Special Zone Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

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