Low Pressure MEMS Sensor: Analysis and Experimental Demonstration-Reference-Cited by-同舟云学术

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Low Pressure MEMS Sensor: Analysis and Experimental Demonstration

Published:2023-12-11 Issue: Volume: Page:256-259
ISSN:
Container-title:2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
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Author:

Alattar Basil¹,Ghommem Mehdi¹,Hemid Mohamed²

Affiliation:

1. American University of Sharjah,Departement of Mechanical Engineering,Sharjah,UAE,26666

2. American University of Sharjah,Mechatronics Graduate Program,Sharjah,UAE,26666

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10417078/10417080/10417319.pdf?arnumber=10417319

Reference10 articles.

1. Recent Progress of Miniature MEMS Pressure Sensors

2. MEMS Sensors for Automotive Applications: A Review

3. A review of principles of MEMS pressure sensing with its aerospace applications

4. Squeeze film air damping in MEMS

5. Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon

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