On the origin of leakage currents in silicon-on-sapphire MOS transistors
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx5/16/31764/01479004.pdf?arnumber=1479004
Cited by 39 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Improvement in off-State Leakage Current of n-Channel SOS MOSFETs by Hydrogen Annealing of the SOS Film;IEEE Transactions on Electron Devices;2011-11
2. Monitoring the Electrical Properties of the Back Silicon Interface of Silicon-on-Sapphire Wafers;IEEE Electron Device Letters;2008-04
3. Characterization and profile optimization of SiGe pFETs on silicon-on-sapphire;IEEE Transactions on Electron Devices;1999
4. LPCVD Polysilicon SOI MOSFET Technology for 3-D Integration;IETE Journal of Research;1990-05
5. Isolation Techniques;VLSI Electronics Microstructure Science;1989
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