PSG masks for diffusions in gallium arsenide

Author:

Baliga B.J.,Ghandhi S.K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. The Use of Anodic Oxide Films to Control the Diffusion of Zinc in GaAs;Journal of The Electrochemical Society;1994-06-01

2. References;Thin Films by Chemical Vapour Deposition;1990

3. Reliable Spin‐On Source for Acceptor Diffusion into III/V Compound Semiconductors;Journal of The Electrochemical Society;1989-08-01

4. GaAs shallow homojunction solar cells fabricated on thin epitaxial films by a simple Zn solid state diffusion method;Solar Energy Materials;1986-08

5. Ultra-Thin p+ Layers in GaAs;MRS Proceedings;1986

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