Feature Selection for Virtual Metrology Modeling: An application to Chemical Mechanical Polishing
Author:
Affiliation:
1. Univ. Clermont Auvergne,Mines Saint-Etienne,F-42023 Saint-Etienne,France
Funder
Electronic Components and Systems for European Leadership
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9792471/9792473/09792527.pdf?arnumber=9792527
Reference13 articles.
1. DEAP: Evolutionary algorithms made easy;fortin;Journal of Machine Learning Research,2012
2. VIRTUAL METROLOGY MODELING BASED ON GAUSSIAN BAYESIAN NETWORK
3. Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
4. Virtual metrology as an approach for product quality estimation in industry 4.0: a systematic review and integrative conceptual framework;dreyfus;International Journal of Production Research,2021
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Virtual metrology in semiconductor manufacturing: Current status and future prospects;Expert Systems with Applications;2024-09
2. Virtual metrology for enabling zero-defect manufacturing: a review and prospects;The International Journal of Advanced Manufacturing Technology;2024-01-09
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