Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology-Reference-Cited by-同舟云学术

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Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Published:2018-07 Issue: Volume: Page:
ISSN:
Container-title:2018 International Conference on Optical MEMS and Nanophotonics (OMN)
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Author:

Gehner A.,Durr P.,Kunze D.,Rudloff D.,Elgner A.,Heber J.,Frances S.,Skupsch C.,Torlee H.,Eckert M.,Friedrichs M.,Schmidt J.,Pufe W.,Doring S.,Hohle C.,Schulze M.,Wagner M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8445122/8454458/08454624.pdf?arnumber=8454624

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Micro mirrors;Handbook of Silicon Based MEMS Materials and Technologies;2020

4. 2D broadband beamsteering with large-scale MEMS optical phased array;Optica;2019-04-29

5. MEMS piston mirror arrays with force-balanced single spring;MOEMS and Miniaturized Systems XVIII;2019-03-04

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