High-Quality Micromachining of Silicon at 1064 nm Using a High-Brightness MOPA-Based 20-W Yb Fiber Laser
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Link
http://xplorestaging.ieee.org/ielx5/2944/4811094/04806027.pdf?arnumber=4806027
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