Electrostatic Actuation of Three-Dimensional MEMS Mirrors Using Sidewall Electrodes-Reference-Cited by-同舟云学术

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Electrostatic Actuation of Three-Dimensional MEMS Mirrors Using Sidewall Electrodes

Published:2004-05 Issue:3 Volume:10 Page:472-477
ISSN:1077-260X
Container-title:IEEE Journal of Selected Topics in Quantum Electronics
language:en
Short-container-title:IEEE J. Select. Topics Quantum Electron.

Author:

Pu C.,Park S.,Chu P.B.,Lee S.-S.,Tsai M.,Peale D.,Bonadeo N.H.,Brener I.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

Link

http://xplorestaging.ieee.org/ielx5/2944/29291/01323050.pdf?arnumber=1323050

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Online Optimization Control With Predictive Gradient Descent for MEMS Micro-Mirrors;IEEE Transactions on Industrial Electronics;2022-07

4. Stabilized control of electromagnetic micro-mirror;2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2021-08-02

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