pNeurFill: Enhanced Neural Network Model-Based Dummy Filling Synthesis With Perimeter Adjustment-Reference-Cited by-同舟云学术

pNeurFill: Enhanced Neural Network Model-Based Dummy Filling Synthesis With Perimeter Adjustment

Published:2024-02 Issue:2 Volume:43 Page:667-680
ISSN:0278-0070
Container-title:IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
language:
Short-container-title:IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst.

Author:

Chen Zhaoting¹^ORCID,Cai Junzhe²^ORCID,Yan Changhao¹^ORCID,Bi Zhaori¹^ORCID,Ma Yuzhe³^ORCID,Yu Bei⁴^ORCID,Hu Wenchuang⁵,Zhou Dian⁶^ORCID,Zeng Xuan¹^ORCID

Affiliation:

1. School of Microelectronics, State Key Laboratory of Integrated Chips and System, Fudan University, Shanghai, China

2. Morefun Studios, Tencent Inc., Shanghai, China

3. Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China

4. Department of Computer Science and Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong

5. Precision Medicine Center, West China Hospital, Sichuan University, Chengdu, China

6. Department of Electrical Engineering, The University of Texas at Dallas, Richardson, TX, USA

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China (NSFC) Research Projects

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Software

Link

http://xplorestaging.ieee.org/ielx7/43/10410112/10266710.pdf?arnumber=10266710

Reference34 articles.

1. CMP Fill Synthesis: A Survey of Recent Studies

2. The physical and electrical effects of metal-fill patterning practices for oxide chemical-mechanical polishing processes

3. Investigation of the capacitance deviation due to metal-fills and the effective interconnect geometry modeling

4. Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy Fill

5. Dummy fill density analysis with coupling constraints