Study of Coating Effect on TEM Sample Damage and Elemental Analysis-Reference-Cited by-同舟云学术

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Study of Coating Effect on TEM Sample Damage and Elemental Analysis

Published:2024-03-17 Issue: Volume:14 Page:1-4
ISSN:
Container-title:2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
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Author:

Xu Yun¹,Zhang Fan¹,Chen Fairy¹

Affiliation:

1. Semiconductor Manufacturing International (Shanghai) Corporation Failure Analysis Laboratory,Shanghai,P. R. China,201203

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10531806/10531771/10532097.pdf?arnumber=10532097

Reference9 articles.

1. Surface damage of semiconductor TEM samples prepared by focused ion beams;Walker;Inst. Phys. Conf. Ser

2. Sidewall damage induced by FIB milling during TEM sample preparation

3. Study on the Effect of FIB Electron Beam Assisted Platinum Deposition on TEM Sample Analysis [CD];Jianqiang;2006 ISTFA,2006

4. Impulsive excitation of FeCp+2 and SiMe+3 during surface induced dissociation at organic multilayers;Winters;Surface Sci. Rep.,1992

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