Surface acoustic wave microsensors using diffused substrates
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx1/16/151/00002526.pdf?arnumber=2526
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication and characterization of 1.1GHz blade nanoelectromechanical resonator;Applied Physics Letters;2005-05-23
2. Tactile measuring systems for the recognition of unknown surfaces;IEEE Transactions on Instrumentation and Measurement;2002-06
3. Sensor calibration of a SAW resonator for absolute humidity measurements in microelectronic packages;Sensors and Actuators B: Chemical;1995-04
4. Application of a surface acoustic wave sensor system for the detection of non-aqueous solutions and phase transitions in lipid multibilayers;Analytica Chimica Acta;1994-04
5. Deposition of LiNbO3 thin films on c-axis oriented epitaxial Y1Ba2Cu307-δ films by pulsed excimer laser ablation;Journal of Crystal Growth;1993-03
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