Design and Modeling of a Dual-Driving PMUT with Increased Round-Trip Sensitivity-Reference-Cited by-同舟云学术

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Design and Modeling of a Dual-Driving PMUT with Increased Round-Trip Sensitivity

Published:2023-07-23 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
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Author:

He Leming¹,Lv Ning¹,Wang Yan¹,Xu Weijiang²,Ren Junyan¹

Affiliation:

1. Fudan University,State Key Laboratory of ASIC and System, School of Microelectronics,Shanghai,China

2. Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille,UMR 8520-IEMN- Institut d’Electronique de Microélectronique et de Nanotechnologie INSA Hauts-de-France,Valenciennes,France,F-59313

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10265288/10265319/10265682.pdf?arnumber=10265682

Reference12 articles.

1. 3D MEMS piezoelectric ultrasound transducer technology

2. Review of piezoelectric micromachined ultrasonic transducers and their applications

3. Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure

4. Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications

5. Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation

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