A Deep Learning Model for Robust Wafer Fault Monitoring With Sensor Measurement Noise-Reference-Cited by-同舟云学术

A Deep Learning Model for Robust Wafer Fault Monitoring With Sensor Measurement Noise

Published:2017-02 Issue:1 Volume:30 Page:23-31
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Lee Hoyeop,Kim Youngju,Kim Chang Ouk^ORCID

Funder

Technology Innovation Program (Development of Big-Data-Based Analysis and Control Platforms for Semiconductor Manufacturing Plants) by the Ministry of Trade, Industry, and Energy, MOTIE, South Korea

National Research Foundation of Korea through the Korean Government (MSIP)

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/7831499/07744687.pdf?arnumber=7744687

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