Funder
Technology Innovation Program (Development of Big Data-Based Analysis and Control Platform for Semiconductor Manufacturing Plants) through the Ministry of Trade, Industry and Energy, South Korea
Global Ph.D. Fellowship Program through the National Research Foundation of Korea (NRF) by the Ministry of Education
NRF Grant by the Korean Government (MSIP)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
53 articles.
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