Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques-Reference-Cited by-同舟云学术

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Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques

Published:2022-10-23 Issue: Volume: Page:
ISSN:
Container-title:2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)
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Author:

Zehetner J.¹,Vanko G.²,Izsak T.²,Kovcova E.²,Drzik M.³,Dohnal F.¹,Kromka A.⁴

Affiliation:

1. Research Centre for Microtechnology, University of Applied Sciences,Dornbirn,Austria,6850

2. Institute of Electrical Engineering, Slovak Academy of Sciences,Bratislava,Slovakia,841 04

3. International Laser Centrum,Bratislava,Slovakia,841 04

4. Institute of Physics, Czech Academy of Sciences,Prague 6,Czech Republic,162 00

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9966729/9966739/09966776.pdf?arnumber=9966776

Reference6 articles.

1. Enhanced vibration decay in high-Q resonators by confined of parametric excitation

2. Linear antenna microwave plasma CVD deposition of diamond films over large areas

3. Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors

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