Silicon accelerometer with differential Frequency Modulation and continuous self-calibration-Reference-Cited by-同舟云学术

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Silicon accelerometer with differential Frequency Modulation and continuous self-calibration

Published:2013-01 Issue: Volume: Page:
ISSN:
Container-title:2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Trusov Alexander A.,Zotov Sergei A.,Simon Brenton R.,Shkel Andrei M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6471302/6474158/06474168.pdf?arnumber=6474168

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