Thermopile infrared array sensor for human detector application-Reference-Cited by-同舟云学术

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Thermopile infrared array sensor for human detector application

Published:2014-01 Issue: Volume: Page:
ISSN:
Container-title:2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Tanaka J.,Shiozaki M.,Aita F.,Seki T.,Oba M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6749560/6765550/06765866.pdf?arnumber=6765866

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 300 mm CMOS-compatible fabrication of Ru₂Si₃ sub-50 nm thin films and characterization;Applied Physics Letters;2022-05-30

2. Single-side micromachined ultra-small thermopile IR detecting pixels for dense-array integration;Journal of Micromechanics and Microengineering;2022-03-23

3. 100-μm-Scale High-Detectivity Infrared Detector With Thermopile/Absorber Double-Deck Structure Formed in (111) Silicon;IEEE Transactions on Electron Devices;2021-12

4. Ultra-Small Pixel IR Sensing Array Fabricated with a Post-CMOS Compatible Process;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20

5. CMOS-MEMS Technologies for the Applications of Environment Sensors and Environment Sensing Hubs;Journal of Micromechanics and Microengineering;2021-05-25

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