ALN-based piezoelectric resonator for infrared sensing application
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/6749560/6765550/06765734.pdf?arnumber=6765734
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film;Applied Physics Letters;2024-05-06
2. A Laterally Excited Bulk Acoustic Wave Resonator towards High Figure-of-Merit in Radio-Frequency Applications;2022 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP);2022-11-27
3. A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20
4. Investigation of modified Lamé mode resonator with high coupling coefficient;Journal of Applied Physics;2020-02-21
5. AlN Checker-mode Resonators with Routing Structures;2019 IEEE International Ultrasonics Symposium (IUS);2019-10
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