Epitaxially-encapsulated quad mass gyroscope with nonlinearity compensation-Reference-Cited by-同舟云学术

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Epitaxially-encapsulated quad mass gyroscope with nonlinearity compensation

Published:2016-01 Issue: Volume: Page:
ISSN:
Container-title:2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Taheri-Tehrani Parsa,Kline Mitchell,Izyumin Igor,Eminoglu Burak,Yeh Yu-Ching,Yang Yushi,Chen Yunhan,Flader Ian,Ng Eldwin J.,Kenny Thomas W.,Boser Bernhard E.,Horsley David A.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7411154/7421533/7421793.pdf?arnumber=7421793

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