12-bit microelectromechanical digital-to-analog converter of displacement: Design, fabrication and characterization-Reference-Cited by-同舟云学术

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12-bit microelectromechanical digital-to-analog converter of displacement: Design, fabrication and characterization

Published:2007-01 Issue: Volume: Page:
ISSN:
Container-title:2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Sarajlic Edin,Collard Dominique,Hiroshi Toshiyoshi ,Hiroyuki Fujita

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4432954/4432955/04433126.pdf?arnumber=4433126

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors;2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2024-04-07

2. Large Displacement Actuators With Multi-Point Stability for a MEMS-Driven THz Beam Steering Concept;Journal of Microelectromechanical Systems;2023-04

3. Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke;Actuators;2023-03-30

4. How to Defeat Electric Noise in Measurement Acquisition Using a Micromechanical Analog-to-Digital Converter;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

5. Design and Simulation of MEMS-Based Digital-to-Analog Converters for In-Plane Actuation;Arabian Journal for Science and Engineering;2017-04-22

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