High-frequency capacitive disk gyroscopes in (100) and (111) silicon-Reference-Cited by-同舟云学术

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High-frequency capacitive disk gyroscopes in (100) and (111) silicon

Published:2007-01 Issue: Volume: Page:
ISSN:
Container-title:2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Houri Johari ,Farrokh Ayazi

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4432954/4432955/04433009.pdf?arnumber=4433009

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