Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices-Reference-Cited by-同舟云学术

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Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices

Published:2009-01 Issue: Volume: Page:
ISSN:
Container-title:2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
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Author:

Defay E.,Le Rhun G.,Perruchot F.,Rey P.,Suhm A.,Aid M.,Liu L.J.,Pacheco S.,Miller M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4799071/4805295/04805458.pdf?arnumber=4805458

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of electrically induced cracks on the properties of PZT thin film capacitors;Applied Physics Letters;2022-12-05

2. Atomic layer deposition of perovskites—Part 1: Fundamentals of nucleation and growth;Material Design & Processing Communications;2019-12-26

3. Atomic layer deposition of perovskites part 2: Designing next generation electronic applications;Material Design & Processing Communications;2019-12-25

4. Integrated metallic gauge in a piezoelectric cantilever;Sensors and Actuators A: Physical;2011-12

5. Influence of the crystallographic orientation of Pb(Zr,Ti)O3 films on the transverse piezoelectric coefficient d31;2011 IEEE International Ultrasonics Symposium;2011-10

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