Thin-film piezoelectric-on-substrate resonators with Q enhancement and TCF reduction-Reference-Cited by-同舟云学术

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Thin-film piezoelectric-on-substrate resonators with Q enhancement and TCF reduction

Published:2010-01 Issue: Volume: Page:
ISSN:
Container-title:2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Pan Wanling,Ayazi Farrokh

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/5438531/5442276/05442303.pdf?arnumber=5442303

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

3. Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes;Microsystems & Nanoengineering;2023-02-21

4. High-Q and Low-Motional Impedance Piezoelectric mems Resonator through Mechanical Mode Coupling;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

5. Four-Leaf Clover Shaped Phononic Crystals for Quality Factor Improvement of AlN Contour Mode Resonator;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

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