Electrical Admittance Spectroscopy for Piezoelectric MEMS-Reference-Cited by-同舟云学术

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Electrical Admittance Spectroscopy for Piezoelectric MEMS

Published:2013-04 Issue:2 Volume:22 Page:295-302
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Kim Donghwan,Hewa-Kasakarage Nishshanka N.,Yoon Sang H.,Kirk Karen D.,Kuntzman Michael,Hall Neal A.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6490351/06340301.pdf?arnumber=6340301

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Magnetoelastic Vibration Sensors;Sensors & Instrumentation and Aircraft/Aerospace Testing Techniques, Volume 8;2023-11-22

2. Piezoelectric Pressure Sensors for Hypersonic Flow Measurements;Journal of Microelectromechanical Systems;2019-04

3. Surface micromachined differential piezoelectric shear-stress sensors;Journal of Micromechanics and Microengineering;2016-10-28

4. Micromachined In-Plane Pressure-Gradient Piezoelectric Microphones;IEEE Sensors Journal;2015-03

5. A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones;The Journal of the Acoustical Society of America;2014-11

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