A Compliant MEMS Device for Out-of-Plane Displacements With Thermo-Electric Actuation-Reference-Cited by-同舟云学术

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A Compliant MEMS Device for Out-of-Plane Displacements With Thermo-Electric Actuation

Published:2014-06 Issue:3 Volume:23 Page:661-671
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Vitellaro Giuseppe,L'Episcopo Gaetano,Trigona Carlo,Ando Bruno,Baglio Salvatore

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/6823193/06627923.pdf?arnumber=6627923

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Robotic micromanipulation: a) actuators and their application;Robotic Systems and Applications;2021-06-30

2. A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices;Nanoscale Research Letters;2021-01-26

3. Foundations for Soft, Smart Matter by Active Mechanical Metamaterials;Advanced Science;2020-08-18

4. Design and Assessment of a Micropositioning System Driven by Electromagnetic Actuators;IEEE/ASME Transactions on Mechatronics;2017-02

5. Thermal behavior modeling and characteristics analysis of electrothermal microactuators;Microsystem Technologies;2016-07-12

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