Anisotropic Etching of Silicon as a Tool for Creating Injection Molding Tooling Surfaces-Reference-Cited by-同舟云学术

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Anisotropic Etching of Silicon as a Tool for Creating Injection Molding Tooling Surfaces

Published:2006-12 Issue:6 Volume:15 Page:1671-1680
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Werkmeister Jaime,Gosalvez Miguel A.,Willoughby Patrick,Slocum Alexander H.,Sato Kazuo

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/4020250/04020298.pdf?arnumber=4020298

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Plasmonic origami: tuning optical properties by periodic folding of a gold nano film;Journal of the Optical Society of America B;2022-04-21

2. Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays;Journal of Micromechanics and Microengineering;2019-01-04

3. Research on impact behaviour and silicon insert fracture phenomenon in microinjection moulding;AIP Advances;2015-04

4. Wet Etching of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015

5. Complex Chiral Colloids and Surfaces via High-Index Off-Cut Silicon;Nano Letters;2014-04-28

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