Funder
Natural Sciences and Engineering Research Council of Canada
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
2 articles.
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1. Junctions and Micromachines;2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO);2021-09-22
2. Silicon MEMS inertial sensors evolution over a quarter century;Journal of Micromechanics and Microengineering;2021-07-14