Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror
Author:
Affiliation:
1. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China
2. Jiangsu Research Center for Intelligent Navigation and Control of Complex Motion, Nanjing University of Science and Technology, Nanjing, China
Funder
Foundation Strengthening Plan Technology Field Fund Project
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/10336244/10252069.pdf?arnumber=10252069
Reference32 articles.
1. Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning
2. Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
3. AlN based piezoelectric micromirror
4. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Accurately estimating the scanning angle of an electrostatic MEMS mirror with a novel damping model;Sensors and Actuators A: Physical;2024-08
2. A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application;Journal of Microelectromechanical Systems;2024
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